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FEI Helios G4 UX Plasma FIB/FE SEM

pfibContact: Rick Noll (noll@engr.wisc.edu, 608-263-3667)
Instrument Location:  MSE Room 120

The Helios Plasma Focused Ion Beam (PFIB) Workstation is a fully digital, Extreme High Resolution (XHR) Field Emission Scanning Electron Microscope (FE SEM) equipped with inductively coupled plasma (ICP) focused ion beam (PFIB). It allows in-situ large area sample preparation and high resolution imaging and analysis of
hundreds of microns areas. Site specific, high volume material removal for top down deprocessing, x-sectioning, Chunking and TEM preparation on individual die and/or packaged parts in a laboratory environment. The key enabling technologies are all integrated onto a single platform such as:

  • XHR electron optics (magnetic immersion lens type) with electrostatic scanning,and advanced SE detection
  • An ultra-high brightness NG electron source
  • Electron Beam Deceleration for improved low energy performance, access to ultra-low landing energies (down to 20 eV) and balanced topographic and material contrasts.
  • An optional high-sensitivity, retractable solid-state backscattered detector (DBS)
  • Complete suite of standard high-sensitivity detectors for superior detection of SE and BSE signals even at low landing energies, with the ability to acquire simultaneous SE and BSE images.
  • ConstantPower™ design of electromagnetic lenses for ultimate stability, high controllability and reproducibility of the electron beam
  • PFIB Ion Column for outstanding performance in high volume material removal and precision milling
  • Integrated control of the MultiChem Gas Delivery System to deliver precise, repeatable doses to the sample as well as mix gas precursors prior to injection. At least one metal deposition precursor must be selected with up to an additional five selectable precursors optionally available, including up to two external gases.
  • A high-precision, 5-axes eucentric specimen stage with 150 mm travel along the x and y axes.
  • An integrated beam current measurement
  • A high-resolution, 16-bit digital patterning engine capable of Simultaneous Pattern and Imaging (SPI™)
  • An integrated Real Time Monitor (iRTM)
  • Selective Etch Software to enable contrast selective milling
  • A system architecture which is optimized for automation to support consistent EFI sample preparation or Slice and View applications
  • Optional iFast™ Academic Science automation package enables engineers to quickly and easily create new recipes or modify existing recipes for use with the iFast Runner
  • Designed for SEMI S2 and CE compliance
  • Windows User Interface optimized for three 24” widescreen LCD monitors, allowing for up to four independent live images and a large image window
  • Manual user interface and joystick for fast and intuitive microscope control
The instrument is also equipped with the TEAM EDS system:

The TEAM™ Software Suite, coupled with the Octane Elect and Octane Elite Energy Dispersive Spectroscopy (EDS) Systems is the most intuitive and easy to use analytical tool available for the SEM.  The workflow functions are automated by integrating years of EDAX knowledge and expertise to work for you. Startup, Analysis, and Reporting are easy because the TEAM™ software automates each task. It is the only EDS technology that combines smart decision making and guidance for the novice with advanced features for the experienced user. Now you have the intelligence of an EDS expert every step of the way.

Smart features, exceptional results

The TEAM™ Software Suite for the SEM was designed to save time and ensure accurate, reproducible results for a wide range of applications. Whether simply collecting a spectrum or performing complex phase analysis, the system and its touch screen capability make it easy to quickly get the results you want. The software is built with a modern interface optimized for running in multicore and multiprocessor environments. Our TEAM™ Software Suite offers Smart Features for startup, analysis, and reporting not found in any other system. The core components that make up this functionality include:

Startup

Smart Track’s environmental panel monitors system status; reports operating conditions for the detector, stage, column, and more; plus allows access to advanced controls. Smart Acquisition automates routine tasks for ease of use and times savings.

Analysis

Smart Phase Mapping provides a higher level of analysis by automatically collecting spectra and generating phase maps with elemental distribution and associated spectra. Point analysis and line scan with next-generation EXpert ID enable fast and easy measurement of individual and multiple points from selected areas.

Octane Elite Super - 70 mm2 chip

Best Light Element Performance

The silicon nitride window offers major improvements compared to a polymer window, leading to greatly improved light element performance and significantly more critical data for the analyst.

Si3N4 Window

The silicon nitride window offers superior low energy transmission compared to a polymer window.

Benefits

Low kV Performance

The mechanical properties of Si3N4 allow the use of thinly fabricated windows, offering a great benefit in terms of sensitivity and optimal low voltage analysis.

Optimized SDD Electronics
  • Fast pulse processing from mapping and quantification
  • Optimized data quality at all count rates
  • High resolution quantitative analysis at mapping speeds greater than 400,000 output cps
Throughput

EDAX EDS systems with advanced detection electronics offer the highest throughput count rates on the market for the best possible analysis and increased productivity.

Reliability

The material properties and durability of Si3Nensure the most robust and reliable detectors available for all EDS applications.

 

TEAM™ EBSD Analysis System

TEAM™ EBSD Analysis System combines the ease of use of the TEAM™ software platform with the analytical power of OIM to provide state of the art crystal structure characterization to all users.

 

Hikari Super - up to 1,400 indexed points per second

The indexing speed increases between each model are available at all camera resolutions, allowing real acquisition speeds to be achieved on both routine and challenging samples.

Typical Uses:

  • High speed analysis for process development and quality control applications
  • High sensitivity indexing with low beam currents and low accelerating voltages when improved spatial resolution is required

Features and Benefits

Data collection rates up to 1,400 indexed points per second

·         Maps can be collected in minutes for efficient SEM use

Maximum EBSD camera sensitivity

  • High quality performance across the entire range of SEM operating conditions including:

·         Beam currents as low as 100 pA

·         Accelerating voltages as low as 5 kV

Precision orientation measurements to less than 0.1°

  • Enables detailed microstructural characterization of plastic strain, subgrain evolution and deformation mechanisms for better understanding of processing-microstructure-property relationships

High indexing success rates

  • EDAX's patented Confidence Index determines not only an indexing rate, but an indexing success rate which provides confidence for your orientation data
  • Know more about every sample by indexing a high percentage of data and avoiding assumptions caused by incomplete measurements

Integrated Forward Scatter Detector (FSD) for reviewing sample microstructure prior to performing EBSD scan

  • Provides orientation, composition and topographic contrast imaging for a preview of EBSD prepared samples

Compatible with Pattern Region of Interest Analysis System (PRIAS™) Live Imaging

  • High speed Hikari Series cameras can be used as imaging detectors in PRIAS™ Live mode
  • Provides 25 images from pre-defined region of interest (ROI) detectors that can be arithmetically processed to enhance, suppress, or isolate specific image contrasts
  • PRIAS™ imaging provides synchronous imaging of orientation, phase, and topographic contrasts of EBSD samples

 

 

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