Home‎ > ‎Instruments‎ > ‎

Thermo Scientific K-alpha XPS

 K-Alpha XPS System Features
Micro-focused monochromated Al Ka X-ray source
High transmission lens optics
•180° spherical sector electron analyzer
•128-channel detector
•One-click charge compensation system
•Ion source for rapid depth profiling
•Versatile sample handling options
•Unique optical sample viewing system
•Fully automated operation mode
•Remote operation capability
•Avantage software:Fully integrated control, acquisition, processing, and reporting data system

John Jacobs

Instrument Details:

1. Electron Analyser, Transfer Lens and Detector

~Type: 125 mm mean radius full 180 degree hemispherical


~Operating mode: Constant Analyser Energy (CAE)

~Detector: 128 channel position sensitive detector

~Energy range (kinetic energy): 5 - 1500 eV

~Minimum energy step size: 3 meV

~Pass energy: 1 ? 400 eV continuously selectable

2. Microfocused Monochromated X-Ray Source

-Computer controlled crystal alignment

-Data system control of all X-ray source parameters

~Type: 0.25 m Rowland circle monochromator with micro-focused X-ray source

~Electron source: 12 keV nominal operating voltage

~Anode: Water-cooled aluminium-coated anode.

~Crystal Single: toroidal quartz crystal, adjustable from the datasystem with three

degrees of freedom

~X-ray spot sizes: (20-80% size from linescan): User selectable in the range 30 ? 400 um

in 5 um steps

~Maximum power: 72 W (400 um X-ray spot)

~Safety interlocks: High voltage, coolant, vacuum, and

mechanical interlocks

3. Combined Low Energy Electron / Ion Flood Source for Charge Neutralisation

-Low energy-spread, high brightness electron source

-High precision gas inlet for inert gas admission

-Differential pumping

~Type: Patented dual-beam low energy electron / ion source

~Electron beam energy: 0 - 5 eV

~Electron beam emission: Up to 250 uA

~Useable gases for ion flood: Inert gases. Argon is recommended.


The MAGCIS ion source minimizes chemical damage by allowing sputtering with argon

depth profiling with no or minimal sample damage (i.e.,

retention of XPS chemical state information during in depth analysis) in contrast to

monatomic argon ion sources that often cause chemical damage on organic and some

inorganic materials. The MAGCIS does not cause further contamination of the sample

surface characteristic of carbon-based ion sources.

~High precision leak rate gas inlet

~Differential pumping

~Automated beam alignment and focusing

~Type: MAGCIS differentially pumped electron impact source with dual electrostatic lenses

and floating flight tube capable of operating in both cluster and monatomic ion modes

~Gases used: Ar

~Beam energy:

Monatomic mode: 200 eV to 4 keV

Cluster mode: 2 keV to 8 keV

* Maximum Ar beam current:

- Monatomic mode: = 1 uA at 200 eV (high mode)

- Monatomic mode: = 3 uA at 4 keV (high mode)

- Cluster mode: = 5 nA at 4 keV (large mode)

- Cluster mode: = 10 nA at 8 keV (large mode)

Spot size:

Monatomic mode: = 500 um @ 3 uA & 4 keV

Cluster mode: = 500 um @ 10 nA & 8 keV

Cluster size range: 1000 to 2000 average atoms per cluster

Beam deflection: Steerable by electrostatic deflector plates and controlled by electronic

scan unit.

Chamber pressure:

- Monatomic mode: Typically better than 2 × 10-7 mbar

- Cluster mode: Typically better than 5 × 10-7 mbar

5. High performance optics for Specimen Viewing

-High performance colour optical system for precise alignment of analysis position. Three

alignment views are always available:

~Platter View: Automatically recorded image of the sample holder in the loadlock, used

to navigate between the samples mounted on the holder.

~Reflex Optics View: Live, high-magnification view of the analysis position for alignment

of features on the sample with the analysis position.

~Height Setting View: Live, high-magnification view of the analysis position, used to

ensure that the sample is at the correct working distance from the photoelectron transfer


-Two types of sample illumination are provided:

~Off-Axis: Used for samples having a rough surface.

~On-Axis: Used for smooth or highly reflective samples.

6. 4-axis Specimen Stage

-High precision, automated specimen stage with internal stepper motors.

Sample Analysis Report